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US Patent 9916998 Substrate support assembly having a plasma resistant protective layer

Patent 9916998 was granted and assigned to Applied Materials on March, 2018 by the United States Patent and Trademark Office.

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Patent abstract

A substrate support assembly comprises a ceramic body and a thermally conductive base bonded to a lower surface of the ceramic body. The substrate support assembly further comprises a protective layer covering an upper surface of the ceramic body, wherein the protective layer comprises at least one of yttrium aluminum garnet (YAG) or a ceramic compound comprising Y4Al2O9 and a solid-solution of Y2O3—ZrO2.

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