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US Patent 9922799 Apparatus of plural charged-particle beams
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Patent
Date Filed
July 19, 2016
Date of Patent
March 20, 2018
Patent Application Number
15213781
Patent Citations Received
US Patent 12119204 Particle beam system and the use thereof for flexibly setting the current intensity of individual particle beams
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US Patent 12080515 Apparatus for multiple charged-particle beams
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US Patent 12094683 Method for operating a multi-beam particle beam microscope
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US Patent 11657999 Particle beam system and method for the particle-optical examination of an object
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US Patent 11705304 Apparatus of plural charged-particle beams
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US Patent 11804356 Apparatus using multiple beams of charged particles
US Patent 11854765 Multiple charged-particle beam apparatus and methods
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US Patent RE49784 Apparatus of plural charged-particle beams
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US Patent 11887807 Apparatus of plural charged-particle beams
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US Patent 11935721 System comprising a multi-beam particle microscope and method for operating the same
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Patent Jurisdiction
United States Patent and Trademark Office
Patent Number
9922799
Patent Primary Examiner
David E Smith
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