US Patent 9929034 Substrate transfer device

A substrate transfer device includes a casing and a substrate conveying robot. A size of the casing in a second direction Y is more than a size of the casing in a first direction X. The casing includes walls forming a conveying chamber and at least one opening or provided at at least one side of the conveying chamber in the first direction X. The substrate conveying robot includes a base, a robot arm, a robot hand, and a controller. When a space in the conveying chamber except for a predetermined exclusive region is defined as an effective conveying chamber, an entire link length DL of a link is less than a conveying chamber size Dx, and an entire hand length Dh of the robot hand is not less than an effective conveying chamber size Dx′.