US Patent 9933616 Mirror angular-positioning apparatus and processing apparatus
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Patent abstract
An apparatus for angular positioning of a mirror includes a motor that rotates a mirror, a detector that detects a rotational angle of the mirror, and a controller. The controller supplies current to the motor so that the rotational angle of the mirror reaches a target angle, estimates, based on a model representing a relation between a value of current to be supplied to the motor and an angle of inclination of the mirror, the angle of inclination of the mirror to which current is supplied, and if the estimated angle exceeds a predetermined tolerance, adjusts the supply of current to the motor so that the angle of inclination of the mirror falls within the predetermined tolerance.
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Patent Inventor Names
Shinji Ueda0
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US Patent 09933616 Mirror angular-positioning apparatus and processing apparatus US Patent 9933616 Mirror angular-positioning apparatus and processing apparatus
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Patent Number
09933616
Patent Number
9933616
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US Patent 09933616 Mirror angular-positioning apparatus and processing apparatus
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Patent jurisdiction
Patent number
09933616
Date of patent
April 3, 2018
Patent application number
13152901
Date Filed
June 3, 2011
Patent primary examiner
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