US Patent 9953811 Plasma processing method
Patent 9953811 was granted and assigned to Tokyo Electron on April, 2018 by the United States Patent and Trademark Office.
Is a
Current Assignee
Date Filed
July 8, 2014
0
Date of Patent
April 24, 2018
0
Patent Applicant
Patent Application Number
14325457
0
Patent Inventor Names
Yohei Yamazawa
0
Patent Jurisdiction
Patent Number
Patent Primary Examiner
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