Is a
Patent attributes
Patent Applicant
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
John M. White0
Zuoqian Wang0
Date of Patent
May 1, 2018
0Patent Application Number
144638250
Date Filed
August 20, 2014
0Patent Citations Received
Patent Primary Examiner
Patent abstract
A permanent magnetic mask chuck is described herein. The permanent magnetic mask chuck includes a body with a plurality of permanent magnets positioned therein. The permanent magnets can then deliver a magnetic force to a mask to position and hold the mask over or on the substrate for further deposition.
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