Is a
Patent attributes
Patent Jurisdiction
Patent Number
Date of Patent
May 1, 2018
Patent Application Number
15382081
Date Filed
December 16, 2016
Patent Citations Received
Patent Primary Examiner
Patent abstract
A method of filling recesses or grooves on a patterned surface with a layer of film, by combining depositing a film by PEALD/PPECVD on the patterned surface and etching the film, wherein the deposition and the etching are separately controlled, and wherein the conditions for deposition can be controlled by controlling RF power.
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