US Patent 9972503 Etching method
Patent 9972503 was granted and assigned to Tokyo Electron on May, 2018 by the United States Patent and Trademark Office.
Is a
Current Assignee
Date Filed
November 10, 2017
Date of Patent
May 15, 2018
Patent Applicant
Patent Application Number
15809129
Patent Citations Received
Patent Jurisdiction
Patent Number
Patent Primary Examiner
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