US Patent 9978885 Thermo-compensated silicon photo-multiplier with on-chip thermistor

A silicon photomultiplier (SiPM) device is provided with a SiPM matrix fabricated on a substrate, a bias power supply connected to the SiPM matrix, and a compensation circuit coupled to the bias power supply. The bias power supply provides a bias voltage to the SiPM matrix. The compensation circuit can adjust the bias voltage applied to the SiPM matrix in response to temperature changes at the substrate. The compensation circuit includes a resistor fabricated on the substrate with the SiPM matrix. The resistor can have a resistance that varies in response to temperature changes at the substrate.