US Patent 9983145 Test probe card detection method and system thereof

A test probe card detection system includes a linear scanning lens module, a CCD microscope module, a CCD image adjustment module, and a computer. The CCD microscope module adjusts and confirms a scanning optical focal length of a test probe card to be tested. The linear scanning lens module scans all areas data of the test probe card and stores the scanned all areas data in a database. The all areas data is compared with a coordinate file in order to detect defected pins of the test probe card. The CCD microscope module confirms and obtains data of the detected defected pins of the test probe card. The data of the detected defected pins is sent to the CCD image adjustment module and are shown on the computer. The defected pins include pins having surface oxidation, wear, damage, and breaking; lacking of pins; and deflected pins.