US Patent 9984858 ALE smoothness: in and outside semiconductor industry
Patent 9984858 was granted and assigned to Lam Research on May, 2018 by the United States Patent and Trademark Office.
Is a
Current Assignee
Date Filed
August 31, 2016
Date of Patent
May 29, 2018
Patent Applicant
Patent Application Number
15253481
Patent Citations Received
Patent Jurisdiction
Patent Number
Patent Primary Examiner
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