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US Patent 9991131 Dual mandrels to enable variable fin pitch

OverviewStructured DataIssuesContributorsActivity
Is a
Patent
Patent
Date Filed
February 27, 2017
Date of Patent
June 5, 2018
Patent Application Number
15443335
Patent Citations Received
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US Patent 11699591 Two-color self-aligned double patterning (SADP) to yield static random access memory (SRAM) and dense logic
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US Patent 11978639 Two-color self-aligned double patterning (SADP) to yield static random access memory (SRAM) and dense logic
0
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US Patent 11881520 Fin patterning for advanced integrated circuit structure fabrication
0
Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
Patent Number
9991131
Patent Primary Examiner
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Duy-Vu N Deo

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