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US Patent 9997598 Three-dimensional semiconductor device and method of fabrication

OverviewStructured DataIssuesContributorsActivity
Is a
Patent
Patent
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Date Filed
August 8, 2017
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Date of Patent
June 12, 2018
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Patent Application Number
15671771
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Patent Citations Received
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US Patent 11665878 CFET SRAM bit cell with two stacked device decks
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US Patent 12002850 Nanosheet-based semiconductor structure with dielectric pillar
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US Patent 12002683 Lateral etching of silicon
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US Patent 11777015 Multiple planes of transistors with different transistor architectures to enhance 3D logic and memory circuits
Patent Inventor Names
Anton deVilliers
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Jeffrey Smith
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Kandabara Tapily
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Nihar Mohanty
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Subhadeep Kal
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Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
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Patent Number
9997598
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Patent Primary Examiner
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Karen Kusumakar
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