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US Patent D1022933 Wafer support of semiconductor manufacturing apparatus

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Edits on 18 Apr, 2024
"Created via: Patent importer"
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created this topic on 18 Apr, 2024
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Infobox (+40 properties)
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 US Patent D1022933 Wafer support of semiconductor manufacturing apparatus

Infobox
Is a
Patent
Patent
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Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
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Patent Number
D10229330
Patent Inventor Names
Yusaku Okajima0
Date of Patent
April 16, 2024
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Patent Application Number
298281550
Date Filed
February 24, 2022
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Patent Citations
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US Patent D570308 Wafer boat
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US Patent D570309 Wafer boat
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US Patent D580894 Wafer boat
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US Patent D616394 Support of wafer boat for manufacturing semiconductor wafers
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US Patent D616395 Support of wafer boat for manufacturing semiconductor wafers
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US Patent D791721 Wafer boat
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US Patent D893438 Wafer boat
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Patent Primary Examiner
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Elizabeth J Oswecki
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CPC Code
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C23C 14/541
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C23C 14/52
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C23C 14/50
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C23C 14/505
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C23C 16/00
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C23C 16/5096
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C23C 16/458
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C23C 16/4582
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C23C 16/4587
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C23C 16/4583
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C23C 16/4584
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C23C 16/4581
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C23C 16/402
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C23C 14/54
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C23C 14/548
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C23C 14/542
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H01J 27/20
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C23F 1/00
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H01L 21/68714
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H01L 21/68771
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H01L 21/6875
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H01L 21/68735
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H01L 21/673
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H01L 21/67383
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H01L 21/67353
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