US Patent D557425 Cover ring for a plasma processing apparatus

Patent D557425 was granted and assigned to Hitachi on December, 2007 by the United States Patent and Trademark Office.

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Patent

Patent attributes

Current Assignee

Hitachi

Patent Jurisdiction

United States Patent and Trademark Office

Patent Number

D5574250

Patent Inventor Names

Akitaka Makino0

Susumu Tauchi0

Tsutomu Nakamura0

Date of Patent

December 11, 2007

Patent Application Number

292369330

Date Filed

August 25, 2005

Patent Citations Received

‌

US Patent D1008967 Collar for connector

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US Patent 12080522 Preclean chamber upper shield with showerhead

Patent Primary Examiner

‌

Robert A Delehanty

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