US Patent D568914 Substrate support lift pin

Patent D568914 was granted and assigned to Applied Materials on May, 2008 by the United States Patent and Trademark Office.

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Is a

Patent

Patent attributes

Current Assignee

Applied Materials

Patent Jurisdiction

United States Patent and Trademark Office

Patent Number

D5689140

Patent Inventor Names

Takahiro Ito0

David T. Or0

Hiroshi Sato0

Hiroyuki Takahama0

Keith K. Koai0

Koji Ota0

Date of Patent

May 13, 2008

Patent Application Number

292567440

Date Filed

March 24, 2006

Patent Citations Received

‌

US Patent D1009817 Shadow ring lift pin

Patent Primary Examiner

Antoine D. Davis

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