US Patent D606952 Plasma inducing plate for semiconductor deposition apparatus

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Is a

Patent

Patent attributes

Patent Jurisdiction

United States Patent and Trademark Office

Patent Number

D6069520

Patent Inventor Names

Jeong Ho Lee0

Sang Jin Jeong0

Woo Chan Kim0

Date of Patent

December 29, 2009

Patent Application Number

293310220

Date Filed

January 16, 2009

Patent Citations Received

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