US Patent D641829 Plasma reactor showerhead face plate having concentric ridge pattern

Patent D641829 was granted and assigned to Novellus Systems on July, 2011 by the United States Patent and Trademark Office.

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Patent

Patent attributes

Current Assignee

Novellus Systems

Patent Jurisdiction

United States Patent and Trademark Office

Patent Number

D641829

Patent Inventor Names

Ilia Kalinovshi0

Ivelin A. Angelov0

James E. Caron0

Date of Patent

July 19, 2011

Patent Application Number

29378161

Date Filed

October 29, 2010

Patent Citations Received

‌

US Patent D1027120 Seal for an assembly in a vapor deposition chamber

Patent Primary Examiner

‌

Robin Webster

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