US Patent D665491 Deposition chamber cover ring
Patent D665491 was granted and assigned to Applied Materials on August, 2012 by the United States Patent and Trademark Office.
Is a
Current Assignee
Date Filed
January 25, 2012
Date of Patent
August 14, 2012
Patent Application Number
29411713
Patent Citations Received
•••
Patent Inventor Names
Anantha K. Subramani
0
Ashish Goel
0
Patent Jurisdiction
Patent Number
Patent Primary Examiner
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