US Patent D697038 Baffle plate

Patent D697038 was granted and assigned to Tokyo Electron on January, 2014 by the United States Patent and Trademark Office.

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Patent

Patent attributes

Current Assignee

Tokyo Electron

Patent Jurisdiction

United States Patent and Trademark Office

Patent Number

D697038

Patent Inventor Names

Jun Yoshikawa0

Naoki Matsumoto0

Date of Patent

January 7, 2014

Patent Application Number

29416085

Date Filed

March 19, 2012

Patent Citations Received

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US Patent D988299 Cellular module

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US Patent D988300 IoT module

Patent Primary Examiner

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Elizabeth J Oswecki

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