US Patent D766849 Substrate retaining ring

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Is a

Patent

Patent attributes

Patent Jurisdiction

United States Patent and Trademark Office

Patent Number

D7668490

Patent Inventor Names

Hozumi Yasuda0

Osamu Nabeya0

Satoru Yamaki0

Shingo Togashi0

Keisuke Namiki0

Makoto Fukushima0

Date of Patent

September 20, 2016

Patent Application Number

294723500

Date Filed

November 12, 2013

Patent Citations Received

‌

US Patent D998575 Collimator for use in a physical vapor deposition (PVD) chamber

‌

US Patent D1040304 Deposition ring for physical vapor deposition chamber

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US Patent D1013841 Retaining ring

Patent Primary Examiner

‌

Elizabeth J Oswecki

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