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US Patent D769200 Elastic membrane for semiconductor wafer polishing apparatus

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Is a

Patent

Patent attributes

Patent Jurisdiction

United States Patent and Trademark Office

Patent Number

D769200

Patent Inventor Names

Keisuke Namiki0

Hozumi Yasuda0

Makoto Fukushima0

Osamu Nabeya0

Satoru Yamaki0

Shingo Togashi0

Date of Patent

October 18, 2016

Patent Application Number

29472346

Date Filed

November 12, 2013

Patent Citations Received

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US Patent D989012 Elastic membrane

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US Patent 11958163 Substrate holding apparatus, elastic membrane, polishing apparatus, and method for replacing elastic membrane

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US Patent D1007449 Target profile for a physical vapor deposition chamber target

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US Patent D1006768 Semiconductor wafer for mosaic solar cell fabrication

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US Patent D1021832 Elastic membrane

Patent Primary Examiner

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Elizabeth J Oswecki

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