US Patent D790490 Reaction tube

Patent D790490 was granted and assigned to Hitachi Kokusai Electric Inc. on June, 2017 by the United States Patent and Trademark Office.

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Patent

Patent attributes

Patent Applicant

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Hitachi Kokusai Electric Inc.

Current Assignee

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Hitachi Kokusai Electric Inc.

Patent Jurisdiction

United States Patent and Trademark Office

Patent Number

D7904900

Patent Inventor Names

Akihiro Osaka0

Hideto Yamaguchi0

Motoya Takewaki0

Date of Patent

June 27, 2017

Patent Application Number

295566840

Date Filed

March 2, 2016

Patent Citations Received

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US Patent 11952664 Substrate processing apparatus and method of manufacturing semiconductor device

Patent Primary Examiner

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Elizabeth J Oswecki

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