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US Patent D793976 Substrate retaining ring

OverviewStructured DataIssuesContributorsActivity
Is a
Patent
Patent
Date Filed
August 10, 2016
Date of Patent
August 8, 2017
Patent Application Number
29573831
Patent Citations Received
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US Patent D989012 Elastic membrane
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US Patent D1049067 Ring for an anti-rotation process kit for a substrate processing chamber
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US Patent D1021832 Elastic membrane
0
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US Patent D1006768 Semiconductor wafer for mosaic solar cell fabrication
0
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US Patent D1040304 Deposition ring for physical vapor deposition chamber
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Patent Inventor Names
Keisuke Namiki
0
Hozumi Yasuda
0
Makoto Fukushima
0
Osamu Nabeya
0
Satoru Yamaki
0
Shingo Togashi
0
Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
Patent Number
D793976
Patent Primary Examiner
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Elizabeth J Oswecki

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