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US Patent D797691 Composite edge ring

Patent D797691 was granted and assigned to Applied Materials on September, 2017 by the United States Patent and Trademark Office.

Overview Structured Data Issues Contributors Activity

Is a

Patent

Patent attributes

Patent Applicant

Applied Materials

Current Assignee

Applied Materials

Patent Jurisdiction

United States Patent and Trademark Office

Patent Number

D797691

Patent Inventor Names

Jason A. Kenney0

James Rogers0

Olivier Joubert0

Olivier Luere0

Rajinder Dhindsa0

Sunil Srinivasan0

Vedapuram S. Achutharaman0

Date of Patent

September 19, 2017

Patent Application Number

29561163

Date Filed

April 14, 2016

Patent Citations Received

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US Patent D1007449 Target profile for a physical vapor deposition chamber target

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US Patent 11996315 Thin substrate handling via edge clamping

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US Patent D1049067 Ring for an anti-rotation process kit for a substrate processing chamber

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US Patent D1040304 Deposition ring for physical vapor deposition chamber

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US Patent D992615 Focus ring

Patent Primary Examiner

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Elizabeth J Oswecki

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