US Patent D802790 Cover ring for a plasma processing apparatus

Patent D802790 was granted and assigned to Hitachi on November, 2017 by the United States Patent and Trademark Office.

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Is a

Patent

Patent attributes

Patent Applicant

Hitachi

Current Assignee

Hitachi

Patent Jurisdiction

United States Patent and Trademark Office

Patent Number

D8027900

Patent Inventor Names

Susumu Tauchi0

Kohei Sato0

Takashi Uemura0

Date of Patent

November 14, 2017

Patent Application Number

295440690

Date Filed

October 30, 2015

Patent Citations Received

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US Patent 12080522 Preclean chamber upper shield with showerhead

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US Patent D1008967 Collar for connector

Patent Primary Examiner

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Elizabeth J Oswecki

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