US Patent D807481 Patterned heater pedestal
Patent D807481 was granted and assigned to Applied Materials on January, 2018 by the United States Patent and Trademark Office.
Is a
Current Assignee
Date Filed
April 8, 2016
Date of Patent
January 9, 2018
Patent Applicant
Patent Application Number
29560668
Patent Citations Received
Patent Inventor Names
Dongming Iu
0
Mehran Behdjat
0
Patent Jurisdiction
Patent Number
Patent Primary Examiner
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