US Patent D818960 Insulation unit of semiconductor manufacturing apparatus

Patent D818960 was granted and assigned to Hitachi Kokusai Electric Inc. on May, 2018 by the United States Patent and Trademark Office.

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Patent

Patent attributes

Patent Applicant

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Hitachi Kokusai Electric Inc.

Current Assignee

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Hitachi Kokusai Electric Inc.

Patent Jurisdiction

United States Patent and Trademark Office

Patent Number

D818960

Patent Inventor Names

Takatomo Yamaguchi0

Date of Patent

May 29, 2018

Patent Application Number

29572554

Date Filed

July 28, 2016

Patent Citations Received

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US Patent D1003243 Heat insulator cover of semiconductor manufacturing apparatus

Patent Primary Examiner

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Thomas Johannes

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