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US Patent D830981 Susceptor for semiconductor substrate processing apparatus

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Is a

Patent

Patent attributes

Patent Jurisdiction

United States Patent and Trademark Office

Patent Number

D830981

Patent Inventor Names

Sang Jin Jeong0

Jeung Hoon Han0

Ju Hyuk Park0

Young Seok Choi0

Date of Patent

October 16, 2018

Patent Application Number

29604288

Date Filed

May 16, 2017

Patent Citations Received

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US Patent D1021832 Elastic membrane

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US Patent D989012 Elastic membrane

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US Patent 11764101 Susceptor for semiconductor substrate processing

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US Patent D1006768 Semiconductor wafer for mosaic solar cell fabrication

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US Patent D1007449 Target profile for a physical vapor deposition chamber target

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US Patent D1012051 Electrostatic chuck for semiconductor manufacturing device

Patent Primary Examiner

Mitchell I. Siegel

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