US Patent D840365 Cover ring for a plasma processing apparatus

Patent D840365 was granted and assigned to Hitachi on February, 2019 by the United States Patent and Trademark Office.

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Is a

Patent

Patent attributes

Patent Applicant

Hitachi

Current Assignee

Hitachi

Patent Jurisdiction

United States Patent and Trademark Office

Patent Number

D840365

Patent Inventor Names

Kohei Sato0

Kazunori Nakamoto0

Takamasa Ichino0

Date of Patent

February 12, 2019

Patent Application Number

29610999

Date Filed

July 18, 2017

Patent Citations Received

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US Patent D1008967 Collar for connector

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US Patent D1003243 Heat insulator cover of semiconductor manufacturing apparatus

Patent Primary Examiner

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Elizabeth J Oswecki

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