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US Patent D901564 Gas inlet attachment for wafer processing apparatus

OverviewStructured DataIssuesContributorsActivity
Is a
Patent
Patent
0
Date Filed
July 26, 2019
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Date of Patent
November 10, 2020
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Patent Application Number
29699539
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Patent Citations
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US Patent 10364493 Exhaust apparatus and substrate processing apparatus having an exhaust line with a first ring having at least one hole on a lateral side thereof placed in the exhaust line
Patent Citations Received
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US Patent D1017561 Nozzle holder of substrate processing apparatus
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Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
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Patent Number
D901564
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Patent Primary Examiner
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Elizabeth J Oswecki
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