US Patent D913230 Heater for heating semiconductor wafer
Patent D913230 was granted and assigned to Tokyo Electron on March, 2021 by the United States Patent and Trademark Office.
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Patent Inventor Names
Toshiki Kobayashi0
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US Patent D0913230 Heater for heating semiconductor wafer US Patent D913230 Heater for heating semiconductor wafer
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Patent Number
D09132300
Patent Number
D9132300
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Official Website
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Patent Applicant
Current Assignee
Patent Jurisdiction
Patent Number
D09132300
Date of Patent
March 16, 2021
0Patent Application Number
297095890
Date Filed
October 15, 2019
0Official Website
Patent Primary Examiner
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US Patent D0913230 Heater for heating semiconductor wafer
Infobox
Is a
Patent applicant
Current assignee
Patent jurisdiction
Patent number
D0913230
Date of patent
March 16, 2021
Patent application number
29709589
Date Filed
October 15, 2019
Patent primary examiner
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