US Patent D920936 Higher temperature vented susceptor

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Patent

Patent attributes

Patent Jurisdiction

United States Patent and Trademark Office

Patent Number

D9209360

Patent Inventor Names

Sam Kim0

Dakai Bian0

Saket Rathi0

Uday Kiran Rokkam0

Date of Patent

June 1, 2021

Patent Application Number

296771730

Date Filed

January 17, 2019

Patent Citations Received

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US Patent D1021832 Elastic membrane

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US Patent D989012 Elastic membrane

‌

US Patent 11764101 Susceptor for semiconductor substrate processing

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US Patent D1006768 Semiconductor wafer for mosaic solar cell fabrication

Patent Primary Examiner

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Elizabeth J Oswecki

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