US Patent D934315 Deposition ring for a substrate processing chamber
Patent D934315 was granted and assigned to Applied Materials on October, 2021 by the United States Patent and Trademark Office.
Is a
Current Assignee
Date Filed
March 20, 2020
0
Date of Patent
October 26, 2021
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Patent Applicant
Patent Application Number
20200320
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Patent Inventor Names
Keith A Miller
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Goichi Yoshidome
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Ilya Lavitsky
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Patent Jurisdiction
Patent Number
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