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US Patent D942516 Process shield for a substrate processing chamber

Patent D942516 was granted and assigned to Applied Materials on February, 2022 by the United States Patent and Trademark Office.

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Is a

Patent

Patent attributes

Patent Applicant

Applied Materials

Current Assignee

Applied Materials

Patent Jurisdiction

United States Patent and Trademark Office

Patent Number

D942516

Patent Inventor Names

Manjunatha P. Koppa0

Aravind Kamath0

Cheng-Hsiung Matt Tsai0

David Or0

Manjunath H. Venkataswamappa0

Steven V. Sansoni0

Date of Patent

February 1, 2022

Patent Application Number

29679734

Date Filed

February 8, 2019

Patent Citations Received

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US Patent 12080522 Preclean chamber upper shield with showerhead

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US Patent D1032795 Reducing plate

Patent Primary Examiner

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Sheryl Lane

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