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US Patent D947914 Base plate for a processing chamber substrate support

Patent D947914 was granted and assigned to Applied Materials on April, 2022 by the United States Patent and Trademark Office.

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Patent attributes

Patent Applicant

Applied Materials

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Current Assignee

Applied Materials

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Patent Jurisdiction

United States Patent and Trademark Office

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Patent Number

Patent Inventor Names

Mukund Sundararajan0

Manjunatha P. Koppa0

Cheng-Hsiung Matthew Tsai0

Steven V. Sansoni0

Shreesha Yogish Rao0

Date of Patent

April 5, 2022

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Patent Application Number

297595270

Date Filed

November 23, 2020

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Patent Citations

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US Patent D991012 Base plate of a mobile stackable tower

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Patent Primary Examiner

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