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US Patent D973609 Upper shield with showerhead for a process chamber

Patent D973609 was granted and assigned to Applied Materials on December, 2022 by the United States Patent and Trademark Office.

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Is a

Patent

Patent attributes

Patent Applicant

Applied Materials

Current Assignee

Applied Materials

Patent Jurisdiction

United States Patent and Trademark Office

Patent Number

D973609

Patent Inventor Names

Yuichi Wada0

Ananthkrishna Jupudi0

Junqi Wei0

Kang Zhang0

Kelvin Tai Ming Boh0

Sarath Babu0

Yueh Sheng Ow0

Date of Patent

December 27, 2022

Patent Application Number

29732229

Date Filed

April 22, 2020

Patent Citations

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US Patent 10577689 Sputtering showerhead

Patent Citations Received

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US Patent D992614 Focus ring

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US Patent D992615 Focus ring

Patent Primary Examiner

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