US Patent D980177 Ceiling heater for substrate processing apparatus
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Patent Inventor Names
Shinobu Sugiura0
Takuto Shoji0
Tetsuya Kosugi0
Yuya Yoshimura0
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US Patent D0980177 Ceiling heater for substrate processing apparatus US Patent D980177 Ceiling heater for substrate processing apparatus
Infobox
Patent Number
D098017700
Patent Number
D98017700
Edits on 23 Mar, 2023
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Infobox
Is a
Patent Jurisdiction
Patent Number
D09801770
Date of Patent
March 7, 2023
0Patent Application Number
297739720
Date Filed
March 12, 2021
0Patent Primary Examiner
CPC Code
Edits on 8 Mar, 2023
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Infobox (+11 properties)
US Patent D0980177 Ceiling heater for substrate processing apparatus
Infobox
Is a
Patent Jurisdiction
Patent Number
D09801770
Date of Patent
March 7, 2023
0Patent Application Number
297739720
Date Filed
March 12, 2021
0Patent Primary Examiner
CPC Code
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