Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Naoto Nakamura0
Hideaki Mitsutake0
Shinichi Kawate0
Yoshihisa Sano0
Date of Patent
February 26, 2008
Patent Application Number
10640269
Date Filed
August 14, 2003
Patent Primary Examiner
Patent abstract
An electron beam apparatus includes an electron source having an electron-emitting device, an electrode for controlling an electron beam emitted from the electron source, a target to be irradiated with an electron beam emitted from the electron source and a spacer arranged between the electron source and the electrode. The spacer has a semiconductor film on the surface thereof that is electrically connected to the electron source and the electrode.
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