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US Patent RE40586 Reduced striae extreme ultra violet elements

Patent RE40586 was granted and assigned to Corning Incorporated on November, 2008 by the United States Patent and Trademark Office.

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Patent abstract

Titania-containing silica glass bodies and extreme ultraviolet elements having low levels of striae are disclosed. Methods and apparatus for manufacturing and measuring striae in glass elements and extreme ultraviolet elements are also disclosed.

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