US Patent RE41128 Organic anti-reflective coating compositions for advanced microlithography
Patent RE41128 was granted and assigned to Brewer Science on February, 2010 by the United States Patent and Trademark Office.
Is a
Current Assignee
Date Filed
January 25, 2007
Date of Patent
February 16, 2010
Patent Application Number
11657983
Patent Inventor Names
Shreeram V. Deshpande
0
Patent Jurisdiction
Patent Number
Patent Primary Examiner
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