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Yuechuan Yu
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Edits on 14 Dec, 2021
"Remove inverse infobox"
Golden AI
edited on 14 Dec, 2021
Edits made to:
Infobox
(
-4
properties)
Infobox
Patent primary examiner of
US Patent 11174554 Substrate tray for use in thin-film formation device
US Patent 11183371 Plasma processing apparatus and plasma processing method
US Patent 11189465 Adjustable capacitor, impedance matching device and semiconductor processing apparatus
US Patent 11189467 Apparatus and method of attaching pad on edge ring
Edits on 2 Dec, 2021
Golden AI
edited on 2 Dec, 2021
Edits made to:
Infobox
(
+1
properties)
Infobox
Patent primary examiner of
US Patent 11189467 Apparatus and method of attaching pad on edge ring
Golden AI
edited on 2 Dec, 2021
Edits made to:
Infobox
(
+1
properties)
Infobox
Patent primary examiner of
US Patent 11189465 Adjustable capacitor, impedance matching device and semiconductor processing apparatus
Edits on 25 Nov, 2021
Golden AI
edited on 25 Nov, 2021
Edits made to:
Infobox
(
+1
properties)
Infobox
Patent primary examiner of
US Patent 11183371 Plasma processing apparatus and plasma processing method
Edits on 19 Nov, 2021
Golden AI
edited on 19 Nov, 2021
Edits made to:
Infobox
(
+1
properties)
Infobox
Patent primary examiner of
US Patent 11174554 Substrate tray for use in thin-film formation device
"Created via: Entity Importer"
Golden AI
created this topic on 19 Nov, 2021
Edits made to:
Infobox
(
+2
properties)
Yuechuan Yu
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United States Patent and Trademark Office
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