H01L 21/203
Deposition of semiconductor materials on a substrate, e.g. epitaxial growth {solid phase epitaxy} using physical deposition, e.g. vacuum deposition, sputtering
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Edits on 16 Mar, 2022
Golden AI
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Edits on 5 Mar, 2022
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H01L 21/203
Deposition of semiconductor materials on a substrate, e.g. epitaxial growth {solid phase epitaxy} using physical deposition, e.g. vacuum deposition, sputtering
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