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Keath T Chen
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Edits on 14 Dec, 2021
"Remove inverse infobox"
Golden AI
edited on 14 Dec, 2021
Edits made to:
Infobox
(
-13
properties)
Infobox
Patent primary examiner of
US Patent 7905961 Linear type deposition source
US Patent 7914621 Vapor deposition source and vapor deposition apparatus having the same
US Patent 7922821 Source, an arrangement for installing a source, and a method for installing and removing a source
US Patent 7922864 Quick-change precursor manifold for large-area CVD and PECVD
US Patent 7922866 Apparatus for aligning electrodes in a process chamber to protect an exclusion area within an edge environ of a wafer
US Patent 7938931 Edge electrodes with variable power
US Patent 7951262 Plasma processing apparatus and method
US Patent 7959735 Susceptor with insulative inserts
US Patent 7964037 Deposition apparatus
US Patent 7976636 Multiple nozzle evaporator for vacuum thermal evaporation
US Patent 7985295 RF heater arrangement for substrate heating apparatus
US Patent 7993459 Delivering particulate material to a vaporization zone
US Patent 8012259 Substrate processing apparatus
Edits on 13 Dec, 2021
Golden AI
edited on 13 Dec, 2021
Edits made to:
Infobox
(
+1
properties)
Infobox
Patent primary examiner of
US Patent 8012259 Substrate processing apparatus
Edits on 8 Dec, 2021
Golden AI
edited on 8 Dec, 2021
Edits made to:
Infobox
(
+1
properties)
Infobox
Patent primary examiner of
US Patent 7993459 Delivering particulate material to a vaporization zone
Golden AI
edited on 8 Dec, 2021
Edits made to:
Infobox
(
+1
properties)
Infobox
Patent primary examiner of
US Patent 7985295 RF heater arrangement for substrate heating apparatus
Golden AI
edited on 8 Dec, 2021
Edits made to:
Infobox
(
+1
properties)
Infobox
Patent primary examiner of
US Patent 7976636 Multiple nozzle evaporator for vacuum thermal evaporation
Edits on 8 Dec, 2021
Golden AI
edited on 8 Dec, 2021
Edits made to:
Infobox
(
+1
properties)
Infobox
Patent primary examiner of
US Patent 7964037 Deposition apparatus
Golden AI
edited on 7 Dec, 2021
Edits made to:
Infobox
(
+1
properties)
Infobox
Patent primary examiner of
US Patent 7959735 Susceptor with insulative inserts
Golden AI
edited on 7 Dec, 2021
Edits made to:
Infobox
(
+1
properties)
Infobox
Patent primary examiner of
US Patent 7951262 Plasma processing apparatus and method
Golden AI
edited on 7 Dec, 2021
Edits made to:
Infobox
(
+1
properties)
Infobox
Patent primary examiner of
US Patent 7938931 Edge electrodes with variable power
Golden AI
edited on 7 Dec, 2021
Edits made to:
Infobox
(
+1
properties)
Infobox
Patent primary examiner of
US Patent 7922866 Apparatus for aligning electrodes in a process chamber to protect an exclusion area within an edge environ of a wafer
Golden AI
edited on 7 Dec, 2021
Edits made to:
Infobox
(
+1
properties)
Infobox
Patent primary examiner of
US Patent 7922864 Quick-change precursor manifold for large-area CVD and PECVD
Golden AI
edited on 7 Dec, 2021
Edits made to:
Infobox
(
+1
properties)
Infobox
Patent primary examiner of
US Patent 7922821 Source, an arrangement for installing a source, and a method for installing and removing a source
Golden AI
edited on 7 Dec, 2021
Edits made to:
Infobox
(
+1
properties)
Infobox
Patent primary examiner of
US Patent 7914621 Vapor deposition source and vapor deposition apparatus having the same
Golden AI
edited on 7 Dec, 2021
Edits made to:
Infobox
(
+1
properties)
Infobox
Patent primary examiner of
US Patent 7905961 Linear type deposition source
"Created via: Entity Importer"
Golden AI
created this topic on 7 Dec, 2021
Edits made to:
Infobox
(
+2
properties)
Keath T Chen
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United States Patent and Trademark Office
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