Is a
Patent attributes
Current Assignee
0
Patent Jurisdiction
Patent Number
Patent Inventor Names
Hyoung-jo Jeon0
Woo-seok Ko0
Young-hoon Sohn0
Yu-sin Yang0
Byeong-hwan Jeon0
Gil-woo Song0
Kang-woong Ko0
Masahiro Horie0
...
Date of Patent
June 19, 2018
0Patent Application Number
149556350
Date Filed
December 1, 2015
0Patent Citations Received
Patent Primary Examiner
Patent abstract
A surface inspecting method includes: irradiating an incident light beam of a first polarized state on a target object, the incident light beam comprising parallel light and having a cross-sectional area: measuring a second polarized state of a reflected light beam reflected from the target object; and performing inspection on an entire area of the target object on which the incident light beam is irradiated, based on a variation between the first polarized state and the second polarized state.
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