US Patent 10001444 Surface inspecting method
Patent 10001444 was granted and assigned to SAMSUNG ELECTRONICS CO., LTD. on June, 2018 by the United States Patent and Trademark Office.
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Patent abstract
A surface inspecting method includes: irradiating an incident light beam of a first polarized state on a target object, the incident light beam comprising parallel light and having a cross-sectional area: measuring a second polarized state of a reflected light beam reflected from the target object; and performing inspection on an entire area of the target object on which the incident light beam is irradiated, based on a variation between the first polarized state and the second polarized state.
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Patent Inventor Names
Byeong-hwan Jeon0
Gil-woo Song0
Hyoung-jo Jeon0
Kang-woong Ko0
Masahiro Horie0
Sang-kil Lee0
Sang-kyeong Han0
Sung-yoon Ryu0
Tae-heung Ahn0
Woo-seok Ko0
Young-hoon Sohn0
Yu-sin Yang0
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Patent Jurisdiction
Patent Number
100014440
Date of Patent
June 19, 2018
0Patent Application Number
149556350
Date Filed
December 1, 2015
0Patent Citations Received
Patent Primary Examiner
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US Patent 10001444 Surface inspecting method
Infobox
Is a
Current assignee
Patent jurisdiction
Patent number
10001444
Date of patent
June 19, 2018
Patent application number
14955635
Date Filed
December 1, 2015
Patent primary examiner
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