Is a
Patent attributes
Patent Applicant
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Alexey Kuritsyn0
Alexander Bykanov0
Michael Kanouff0
Oleg Khodykin0
Date of Patent
July 24, 2018
0Patent Application Number
148385940
Date Filed
August 28, 2015
0Patent Citations Received
Patent Primary Examiner
Patent abstract
The present disclosure is directed to plasma-based light sources. Systems and methods are described for protecting components of the light source from plasma generated debris which can include target material gas, atomic vapor, high energy ions, neutrals, micro-particles, and contaminants. Particular embodiments include arrangements for reducing the adverse effects of plasma generated ions and neutrals on light source components while simultaneously reducing in-band light attenuation due to target material gas and vapor.
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