US Patent 10034362 Plasma-based light source
Patent 10034362 was granted and assigned to KLA-Tencor on July, 2018 by the United States Patent and Trademark Office.
Is a
Current Assignee
Date Filed
August 28, 2015
0
Date of Patent
July 24, 2018
0
Patent Applicant
Patent Application Number
14838594
0
Patent Citations Received
Patent Inventor Names
Alexey Kuritsyn
0
Alexander Bykanov
0
Michael Kanouff
0
Oleg Khodykin
0
Patent Jurisdiction
Patent Number
Patent Primary Examiner
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