Is a
Patent attributes
Patent Applicant
Patent Jurisdiction
Patent Number
Date of Patent
August 7, 2018
Patent Application Number
14223391
Date Filed
March 24, 2014
Patent Citations Received
Patent Primary Examiner
Patent abstract
A substrate processing apparatus has an indexer block and a processing block. One side of the processing block has a vertical stack of a plurality of top surface cleaning units and the other side of the processing block has a vertical stack of a plurality of back surface cleaning units. Reversing units for reversing the substrate W are provided one above the other between the indexer block and the processing block. For example, one reversing unit is used for reversing the substrate before a back surface cleaning processing by the back surface cleaning unit or for other purposes, and the other reversing unit is used for placing the substrate W after a top surface cleaning processing by the top surface cleaning unit or for other purposes.
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