US Patent 10040102 Substrate processing method
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Patent abstract
A substrate processing apparatus has an indexer block and a processing block. One side of the processing block has a vertical stack of a plurality of top surface cleaning units and the other side of the processing block has a vertical stack of a plurality of back surface cleaning units. Reversing units for reversing the substrate W are provided one above the other between the indexer block and the processing block. For example, one reversing unit is used for reversing the substrate before a back surface cleaning processing by the back surface cleaning unit or for other purposes, and the other reversing unit is used for placing the substrate W after a top surface cleaning processing by the top surface cleaning unit or for other purposes.
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Patent Citations Received
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Golden AI
Infobox
Is a
Patent Applicant
Patent Jurisdiction
Patent Number
100401020
Date of Patent
August 7, 2018
0Patent Application Number
142233910
Date Filed
March 24, 2014
0Patent Citations Received
Patent Primary Examiner
Edits on 1 Mar, 2023
Golden AI
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Infobox (+1 properties)
Infobox
Patent Citations Received
Edits on 25 Sep, 2022
Golden AI
Infobox
Is a
Patent Applicant
Patent Jurisdiction
Patent Number
100401020
Date of Patent
August 7, 2018
0Patent Application Number
142233910
Date Filed
March 24, 2014
0Patent Primary Examiner
Edits on 21 Jan, 2022
Golden AI
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Infobox (+8 properties)
US Patent 10040102 Substrate processing method
Infobox
Is a
Patent applicant
Patent jurisdiction
Patent number
10040102
Date of patent
August 7, 2018
Patent application number
14223391
Date Filed
March 24, 2014
Patent primary examiner
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